Modeling of very thin aluminum nitride film mechanical properties from nanoindentation measurements

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Breadcrumb Abstract Shape
Breadcrumb Abstract Shape
Modeling of very thin aluminum nitride film mechanical properties from nanoindentation measurements
Año:

2015

Journal:
Thin Solid Films, Volume 594, Part A, Pages 1-204
DOI:
10.1016/j.tsf.2015.10.010
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